Gate-last has lately been rumored to be the preferred
method to do HKMG for leading logic lines, what new metrology challenges have
arisen with this flow?
Can anyone share CMP metrics for HKMG at this time? That may shed light on whether there are challenges for current metrology tools. Is measurement of the work function needed or desired?
We're now (January 20th, 2010) past the
official ending (the 18th) of this virtual roundtable discussion, after 4695 views of 129 replies to 18 questions. I'll
edit together Interesting discussions from most of the topics into a
summary document that will be posted to the Planarization Lounge.
We'll leave the topic posting open in case there are additional comments...but they would not be included in the summary.
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